Articles
  • MoO3 thin film synthesis by chemical vapor transport of volatile MoO3(OH)2 
  • Young Jung Leea, Chang Won Parka, Dae-Gun Kima, William T. Nicholsa, Sung-Tag Ohb,* and Young Do Kima,*
  • a Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea b Department of Materials Science and Engineering, Seoul National University of Technology, Seoul 139-743, Korea
Abstract
Molybdenum oxide thin films with good adhesion and crystallinity were homogeneously deposited by the Chemical vapor transport of MoO3(OH)(2) and subsequent dehydration to the Mo oxide phase during hydrogen-reduction. This new deposition technique would be an effective deposition method for MoO3 thin films due to the simple, low-cost, large area deposition and eco-friendly process. The surface morphology dramatically changed by thermal annealing at different temperatures and a uniform similar to 1 mu m thickness was obtained. The effect of the annealing temperature is discussed.

Keywords: Molybdenum oxide; Hydrogen reduction; Chemical vapor transport; heat-treatment

This Article

  • 2010; 11(1): 52-55

    Published on Feb 28, 2010