Solid oxide fuel cells(SOFCs) are interesting as an energy conversion system of the future with high efficiency and environmental cleanness. To fabricate the micro-fuel cell for mobile applications, it is essential to develop a process for the deposition of dense electrolyte films. In this study, for a micro-SOFC application, YSZ electrolyte films were prepared by an electro-spray deposition (ESD) method. The deposition parameters studied were deposition temperature, distance between nozzle and substrate, solution concentration and DC voltage. Depending on these parameters, the surfaces were remarkably changed from cracked or rough surfaces to smooth and dense films. Dense films was prepared with the conditions of a nozzlesubstrate distance of 4 cm, a deposition temperature of 150 oC, a deposition time of 4 minutes, and a voltage of 16 kV.

Keywords: SOFC, Electrolyte, ESD, YSZ.