In this paper the stable Barium Titanate, BaTiO3, (BTO) sol was prepared at the first stage. The obtained results of the mean size of particles showed that the ratio of precursors and their type had a great effect on the stability of the soil and the properties of the thin films. After adjusting the process parameters, the sol with 10 months stability was acquired. The stable sol consisted of acetic acid, barium acetate, TTIP, 2-propanol and deionized water with 7 : 1 : 1 : 1 : 130 molar ratios, respectively. Then, the optimum sol was deposited on the different substrates such as silicon (001), soda-lime glass and alumina and the effect of substrate type was evaluated on the morphology of the thin film. According to AFM and SEM results, it was found that the substrates obviously influenced the microstructure of BaTiO3 thin films and a smooth crack free surface was obtained.

Keywords: Sol-gel; Dip coating; Barium titanate; Thin film