Multiferroic Pb(Zr0.52Ti0.48)O3/BiFeO3 multilayer thin films were fabricated by the spin-coating method on Pt/Ti/SiO2/p-Si(100) substrates alternately using Pb(Zr0.52Ti0.48)O3 and BiFeO3 metal alkoxide solutions. The PZT/BFO multilayer thin films show the formation of layers and a change of lattice constant caused by different structure of each other. The coating and heating procedure was repeated several times to form Pb(Zr0.52Ti0.48)O3/BiFeO3 multilayer films. All films showed the typical XRD patterns of the perovskite polycrystalline structure without the presence of a second phase such as Bi2Fe4O3. Pb(Zr0.52Ti0.48)O3/ BiFeO3 multilayer films showed a uniform and small grain size rather than pure Pb(Zr0.52Ti0.48)O3 and BiFeO3 films. We think that the crystal growth of the upper BiFeO3 layers can be influenced by the lower Pb(Zr0.52Ti0.48)O3 layers, and choosing the initial Pb(Zr0.52Ti0.48)O3 layer or a seeding layer has controlled the microstructural behavior of the resultant film. Leakage current density of the Pb(Zr0.52Ti0.48)O3/BiFeO3 multilayer film was 5.74 × 10-6 A/cm2 at 150 kV/cm.

Keywords: BiFeO3, Pb(Zr, Ti)O3, Multiferroic, Thin film, Sol-gel method.