Articles
  • The electrical insulation characteristics of a glass adhesive process for the silicon MEMS element of a pressure sensor
  • Gon-Jae Leea,b,* and Duck-Kyun Choia

  • aDepartment of Materials Science and Engineering, Hanyang University, Seoul, Korea
    bR&D Center, Mando corporation, Sungnam, Korea

References
  • 1. W.J. Fleming, Sens. J. IEEE 1[4] (2001) 296-308.
  •  
  • 2. L. Boon-Brett, J. Bousek, and P. Moretto, Int. J. Hydrogen Energy. 34[1] (2009) 562-571.
  •  
  • 3. L. Boon-Brett, J. Bousek, G. Black, P. Moretto, P. Castello, T. Hübert, and U. Banach, Int. J. Hydrogen Energy. 35[1] (2010) 373-384.
  •  
  • 4. W. J. Buttner, M. B. Post, R. Burgess, and C. Rivkin, Int. J. Hydrogen Energy. 36[3] (2011) 2462-2470.
  •  
  • 5. R. Singh, Low Lee Ngo, Ho Soon Seng, and F.N.C. Mok, in Proceeding of the First IEEE International Workshop on Electronic Design Test and Applications, January 2002, edited by IEEE (IEEE, 2002) p. 181.
  •  
  • 6. S.M. Sze, in “Semiconductor Sensors” (John Willey & Sons, 1994) p. 160-189.
  •  
  • 7. K. N. Bhat and M. M. Nayak, J. ISSS. 2[1] (2013) 39-71.
  •  
  • 8. L. Lin and W. Yun, in proceeding of Aerospace conference, March 1998, edited by IEEE (IEEE, 1998) p. 429-436.
  •  
  • 9. D. S. Eddy and D. R. Sparks, in Proceeding of the IEEE, August 1998, edited by IEEE (IEEE, 1998) p. 1747.
  •  
  • 10. S. Meti, K. B. Balavald, and B. G. Sheeparmatti, Int. J. Eng. Rese. Ind. Appl. 6[4] (2016) 23-31.
  •  
  • 11. A. Hussain, M. Hannan, H. Sanusi, A. Mohamed, and B. Y. Majlis, J. Appl. Sci. 6[4] (2006) 810-815.
  •  
  • 12. W. P. Eaton, J. H. Smith, D. J. Monk, G. O’Brien, and T. F. Miller, in Proceeding of SPIE, edited by SPIE (SPIE, 2007) p. 431-438.
  •  
  • 13. M. Goel and S. Sharma, J. Electroceram. 12 (2004) 175-179.
  •  
  • 14. H.-B. Jeon, I.-H. Lee, G. S. An, and Y.-S. Oha, J. Ceram. Process. Res. 19[6] (2018) 450-454.
  •  
  • 15. K.-B. Kim, H.-K. Seok, Y.-S. Kim, J.-C. Yoon, D.-Y. Lee, C.-R. Chung, and D.-S. Han, J. Ceram. Process. Res. 7[3] (2006) 266-270.
  •  
  • 16. G.-J. Lee and D.-K. Choi, J. Electroceram 41 (2018) 9-15.
  •  

This Article

  • 2020; 21(S1): 81-86

    Published on May 31, 2020

  • 10.36410/jcpr.2020.21.S1.s81
  • Received on Dec 24, 2019
  • Revised on Mar 30, 2020
  • Accepted on Apr 2, 2020

Correspondence to

  • Gon-Jae Lee
  • aDepartment of Materials Science and Engineering, Hanyang University, Seoul, Korea
    bR&D Center, Mando corporation, Sungnam, Korea
    Tel : +82-2-6188-3343
    Fax: +82-2-6188-3990

  • E-mail: gonjae.lee@halla.com, gondolee@gmail.com