In this study, Ga-doped ZnO (GZO) films were deposited on unheated polyethylene terephthalate (PET) substrates by DC magnetron sputtering. The dependence of the structural, electrical and mechanical properties and surface morphology of the GZO films on their deposition conditions was investigated. The GZO films deposited at a sputtering power of 70 W and a Ptot of 2.0 Pa showed relatively good electrical, structural and optical properties and surface morphology. These results could be explained by the enhancement of the migration of the sputtered atoms (Zn, Ga, O) and low bombardment of the high energy particles (Aro, O−). Therefore, the mechanical durability of the GZO films was related to their electrical and structural properties and surface morphology.

Keywords: GZO, cyclic bending test, PET, DC magnetron sputtering, mechanical property.