Surface modification of powder materials has always been a key issue that must be faced to improve their application properties and application value. Herein, an efficient and eco-friendly CH₄/CF₄ plasma method is used for surface modification of materials. The surface modification mechanism of fluorocarbon plasma under different gas flow ratios was detailed investigated by combining the kinetic analysis. The findings demonstrate that fluorocarbon plasma exhibits different modification mechanisms under different modification conditions. The physicochemical properties of the material surface can be easily controlled by adjusting the ratio of fluorocarbon plasma. Functional CaTiO₃ particles with core-shell structure were successfully prepared when the gas flow rate ratio R=3. The modified surface exhibited extreme hydrophobicity and the lowest surface energy. This strong application of fluorocarbon plasma technology in material surface modification offers a new avenue to prepare environmentally friendly and functional powders

Keywords: Microwave discharge plasma, Surface fluorination, CaTiO₃ particles, Reaction kinetics