Articles
  • Ultrashort pulse laser processing of ZrO2 ceramics

  • Qibiao Yanga, Yunhan Youa, Bojin Chenga, Lie Chena, Jian Chenga, Deyuan Loua,Yutao Wangc and Dun Liub,*

  • aLaser Group, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, People's Republic of China
    bKey Lab of Modern Manufacture Quality Engineering, Hubei University of Technology, Wuhan 430068, People's Republic of China
    cShanghai Institute of Laser Technology, Shanghai Keylab of Laser Beam Micro Processing, Shanghai 200233, People's Republic of China

  • This article is an open access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/4.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

It is crucial to investigate the mechanism of ultrashort pulse laser processing of ZrO2 ceramics to improve its processing accuracy and efficiency. An ultrashort pulse laser was used to fabricate square grooves on the surface of ZrO2 ceramics. The depth, surface roughness, and surface topography of grooves were analyzed by the laser confocal microscope, optical profiler, and scanning electron microscope. The effects of different laser parameters on the material removal efficiency and processing quality of ZrO2 ceramics were studied. The results show that as the laser fluence increases, material removal efficiency first increases and then decreases, while the surface roughness first decreases and then increases. The heat accumulation effect is severe when using high repetition frequency, and the processed surface shows melt damage. As the pulse width increases from 390fs to 6ps, the ablation threshold increases from 1.28 J/cm2 to 1.92 J/cm2. However, the material removal efficiency decreases gradually. Furthermore, the material removal efficiency in burst mode significantly reduces due to the plasma shielding and redeposition of distinct granular deposits within the grooves. These findings can serve as a guide for controlling and optimizing the process parameters of an ultrashort pulse laser processing of ZrO2 ceramics


Keywords: Ultrashort pulse laser, Laser processing, ZrO2 ceramics, Surface roughness, Removal efficiency

This Article

  • 2023; 24(2): 230-236

    Published on Apr 30, 2023

  • 10.36410/jcpr.2023.24.2.230
  • Received on Jul 15, 2022
  • Revised on Dec 6, 2022
  • Accepted on Dec 20, 2022

Correspondence to

  • Dun Liu

  • Key Lab of Modern Manufacture Quality Engineering, Hubei University of Technology, Wuhan 430068, People's Republic of China
    Tel : +86-027-59750418 Fax: +86-027-59750418

  • E-mail: dun.liu@hbut.edu.cn