Jae Uk Hura,** , Jung Hun Kimb,**,
Gye Seok Ana,* and Sung-Churl Choia
a Division of Materials Science and Engineering,
Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763,
Korea
bCeramicware Technology Center, Korea Institute of Ceramic
Engineering & Technology, 3321 Gyeongchung-daero, Sindun-myeon, Icheon
17303, Korea
We investigated the optimal
conditions for the manufacture of a rapid SiC heating element with increased
durability for a flip chip bonder. In the moulding step prior to the sintering
of the SiC heating element, a pressure of either 25 or 125 MPa was applied by
uniaxial pressing to control the micropores; this was aimed at improving the
resistance of the ultimate specimen. The moulded specimen was sintered by using
a vacuum furnace with silicon as a sintering additive. The measurement of the
hot modulus of rupture (HMOR) of the resulting SiC sintered body revealed that
the HMOR was high. In addition, a method for protecting the heating element
from the external environment was developed. A glassy coating layer was
deposited on the surface of the structure to improve the corrosion resistance
of the sintered body; further, the performance of the coating layer was
verified through a neutral and acidic salt spray test. Finally, we established
the optimal process conditions for manufacturing a rapid SiC heating element
with improved corrosion resistance.
Keywords: Heating element, Silicon carbide, Glass coating, Corrosion resistance
2020; 21(2): 213-216
Published on Apr 30, 2020
a Division of Materials Science and Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea
bCeramicware Technology Center, Korea Institute of Ceramic Engineering &