Articles
  • Manufacture of rapid SiC heating element and increased durability through glass frit coating
  • Jae Uk Hura,** , Jung Hun Kimb,**, Gye Seok Ana,*  and Sung-Churl Choia

  • a Division of Materials Science and Engineering, Hanyang University,  222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea
    bCeramicware Technology Center, Korea Institute of Ceramic Engineering & Technology, 3321 Gyeongchung-daero, Sindun-myeon, Icheon 17303, Korea

Abstract

We investigated the optimal conditions for the manufacture of a rapid SiC heating element with increased durability for a flip chip bonder. In the moulding step prior to the sintering of the SiC heating element, a pressure of either 25 or 125 MPa was applied by uniaxial pressing to control the micropores; this was aimed at improving the resistance of the ultimate specimen. The moulded specimen was sintered by using a vacuum furnace with silicon as a sintering additive. The measurement of the hot modulus of rupture (HMOR) of the resulting SiC sintered body revealed that the HMOR was high. In addition, a method for protecting the heating element from the external environment was developed. A glassy coating layer was deposited on the surface of the structure to improve the corrosion resistance of the sintered body; further, the performance of the coating layer was verified through a neutral and acidic salt spray test. Finally, we established the optimal process conditions for manufacturing a rapid SiC heating element with improved corrosion resistance.


Keywords: Heating element, Silicon carbide, Glass coating, Corrosion resistance

This Article

  • 2020; 21(2): 213-216

    Published on Apr 30, 2020

  • 10.36410/jcpr.2020.21.2.213
  • Received on Nov 1, 2019
  • Revised on Feb 5, 2020
  • Accepted on Feb 7, 2020

Correspondence to

  • Jae Uk Hur a, Jung Hun Kim b, Gye Seok An a
  • a Division of Materials Science and Engineering, Hanyang University,  222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea
    bCeramicware Technology Center, Korea Institute of Ceramic Engineering &

  • E-mail: faustmaro@hanyang.ac.kr