In this study, we attempted to achieve a high energy density capacitor using nanocrystalline Bi1.5Zn1.0Nb1.5O7 (BZN) thick film, which is paraelectric material having a linear polarization-electric field behavior. Dense BZN thick films with thickness of 6~10 μm were deposited on the flexible metal substrates by Aerosol deposition. BZN thick films were annealed at various annealing conditions (400, 500 and 600 oC for 2 h) and their energy storage properties were characterized. The BZN films annealed at 400 oC showed the highest discharged energy density (8.87 J/cm3) at 1400 kV/cm. The relative permittivity, which is measured with low electric field, was stable up to 250 oC, and the discharged energy density, which is measured with high electric field, was stable up to 125 oC.
Keywords: Flexible substrate, Energy storage, BZN.