Articles - Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method
- Sakon Sansongsiria,b,* and Somchai Thongtema,b,*
- a Department of Physics and Material Science, Faculty of Science, Chiang Mai University, Chiang Mai 50200, Thailand b Materials Science Research Center, Faculty of Science, Chiang Mai University, Chiang Mai 50200, Thailand
Abstract
Titanium dioxide (TiO2) thin films were deposited on glass substrates by filtered cathodic vacuum arc system (lab-made) forvarious number of pulse modes at -50 VDC, and followed by 450 oC annealing in air for 1 hr. The deposition pulses were 500-2,000 pulses and the anatase film thickness was 13.0-37.5 nm. In this research, the roughness was increased with the increasingin the number of deposition pulses and film thickness. The transmission at 600 nm wavelength was 65-85%, decreasing withthe film thickness, and the optical energy gap was in the range of 3.55-3.65 eV.
Keywords: Anatase thin films, Filtered cathodic vacuum arc, Electron microscopy, Spectroscopy
This Article
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