High quality and transparent indium doped ZnO (IZO) thin films were deposited on glass substrates by sol-gel spin coatingmethod. Zinc acetate and indium (III) chloride were used as precursor solution materials. Structural, morphological, andoptical properties of the films were investigated as a function of indium doping ranging from 0.5% to 2.0 at % by X-raydiffraction, scanning electron microscopy, transmission and energy dispersive X-ray techniques. The films had polycrystallinenature and exhibited a hexagonal wurtzite structure with preferred c-axis orientation. The film surfaces exhibited uniformparticle-like and granular morphologies. The optical transmittance spectra of the undoped ZnO and IZO films were taken inthe wavelength ranging from 350-1000 nm. The transmittance IZO films compared to undoped ZnO has increased withincreasing indium content. The chemical composition of the films indicated the presence of indium element in the ZnO films. These results make IZO thin films an attractive candidate for transparent material applications such as solar cells.

Keywords: In doped ZnO, ZnO, Sol-gel, Optical and structural properties, TCOs