Articles - Electrochromic characterization of amorphous tungsten oxide films deposited on indium tin oxide and CVD-graphene electrodes by RF magnetron sputtering
- Dong Soo Choia,c, Seung Ho Hanc, Hyeongkeun Kimc, Tae Young Kimd, Se Hyun Rhyue, Dae Ho Yoona,b,* and Woo Seok Yangc,*
- a School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746, South Korea b SKKU Advanced Institute of Nanotechnology (SAINT),Sungkyunkwan University, Suwon 440-746, South Korea c Electronic Materials and Device Research Center, Korea Electronics Technology Institute, Seongnam 463-816, South Korea d Department of Bionanotechnology, Gachon University, Seongnam 461-701, South Korea e Intelligent Mechatronics Research Center, Korea Electronics Technology Institute, Puchon 420-140, South Korea
Abstract
Electrochromism in amorphous tungsten oxide films, lasting and reversible color change to dark blue, is up to injection or withdrawal of electrons. Indium tin oxide (ITO) is widely used as the transparent electrodes for electrochromic devices. We sputtered a-WOx film on indium tin oxides (ITO) coated flexible polyelthylene terephthalate (PET) substrate. The sheet resistance of ITO/PET is 200 Ohm/sq. To determine optimum condition, we deposited the films under various partial pressures of oxygen and exposure time for adjusting the thickness of the film at room temperature. Optical properties were checked with optical transmittance and Raman spectroscopy of WO3 film depending on various O-2 pressure. We verified the best condition when WO3 film was deposited on ITO/PET substrate with 2% O-2 partial pressure and the EC property for graphene /PET application.
Keywords: WOx; Electrochromic; ITO; Graphene; Flexible; Sputtering
This Article
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