A comparative study of microwave and conventional sintering of lead-free Li-and Ta-modified (K,Na)NbO3 (KNN) multilayer ceramic actuators (MLCAs) was completed. It was found that microwave sintering (MWS) could be successfully applied to the co-firing of KNN/AgPd MLCAs with a firing cycle that is ten times shorter and a firing temperature 150 oC lower (900 oC) than conventional furnace sintering (1050 oC) for sufficient densification. Furthermore, MWS-derived specimens showed electric field-induced strain comparable to those obtained using conventional sintering.
Keywords: Lead-free piezoceramics, Multilayer actuators, Microwave sintering, Perovskite, Alkaline niobate.