Uncooled pyroelectric infrared based on semiconducting YBa2Cu3O7-x (YBCO) thin films have been investigated. YBCO precursor solutions were prepared by sol-gel method and YBCO films were fabricated by the spin coating method and structural and electrical properties with variation of coating number were studied. The crystal structure of the YBCO film annealed at 750 oC was polycrystalline tetragonal phase. The YBCO film coated with 5 times showed the average grain size of 75 nm and thickness of 185nm. Temperature resistance coefficient (TCR), responsivity and detectivity of the YBCO film sintered at 700 oC were −3%/oC, 43.42V/W and 5.34 × 106 cmHz1/2/W, respectively.

Keywords: Semiconducting YBCO, Thin films, Sol-gel, Infrared sensor.