Articles
  • Effect of thickness on moisture barrier properties of aluminum oxide using ozone-based atomic layer deposition

  • Juhyun Leea, Seokyoon Shina, Sejin Kwona, Woochool Janga, Hyeongsu Choia, Hyunwoo Parka, Namgue Leeb and Hyeongtag Jeona,b,*

  • aDivision of Materials Science and Engineering, Hanyang University, Seoul 04763, Korea
    bDivision of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 04763. Korea

  • This article is an open access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/4.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

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This Article

  • 2021; 22(3): 253-257

    Published on Jun 30, 2021

  • 10.36410/jcpr.2021.22.3.253
  • Received on May 1, 2019
  • Revised on Jan 4, 2021
  • Accepted on Apr 21, 2021

Correspondence to

  • Hyeongtag Jeon

  • aDivision of Materials Science and Engineering, Hanyang University, Seoul 04763, Korea
    bDivision of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 04763. Korea
    Tel : +82-2-2220-0387 Fax: +82-2-2292-3523

  • E-mail: hjeon@hanyang.ac.kr