The percolative Al-filled BaTiO3 composite films of 5 μm thickness were fabricated by aerosol deposition process at room temperature. The aluminum particles were mixed in the BaTiO3 matrix with 0, 16, 21, 31, 38, 42, 47, 63, and 79 vol%. The 47 vol% Al-filled BaTiO3 composite films had high relative dielectric constant of 1028.8 at 1000 Hz owing to the percolation effect. The percolation threshold was observed as ranging from 40 to 55 vol%, for these results, Al-filled BaTiO3 composite film occurred the phase transition and increased the dielectric constant sharply over the 47 vol% Al constant. The leakage current density of 47 vol% Al-filled BaTiO3 composite films was 5.66 A/cm−2 at a high electric field of 20 kV/cm. In addition, fabricated BaTiO3-Al composite films were evaluated their structural and electrical characteristics.

Keywords: Aerosol deposition, Percolation, BaTiO3, Aluminum.