Recently, it has become very important to obtain knowledge about interactions between substrates and deposited materials in an atomic scale. In this study, we focused on the initial stage of Si-Mn films adsorbed on to a Si(111) substrate. A sample were prepared by depositing the Mn particles onto a cleaned Si(111) substrate by the pulsed laser deposition (PLD) method and the observation was performed with a scanning tunneling microscope (STM). First, we have observed adsorption site, size and shape of the particles at room temperature. Next, the change of the STM image at elevated temperature up to 200 oC was observed. In this paper, we have discussed about the structure of clustered Mn particles on Si(111) substrate by comparing the result with particles of other kinds.

Keywords: STM, PLD, Diluted magnetic semiconductor, Adsorption, Mn.