[TiO2|SiO2] multi-layer for the DSSC was fabricated to improve the light re-adsorption of the dye by the enhancement with the light reflectivity from the surface of stainless steel substrate. TiO2 (H) and SiO2 (L) thin films were deposited on the stainless steel substrate by RF magnetron sputtering at a high substrate temperature of 600 ο C and multi-layer structure of [air|(HL)4|304SS] was fabricated. In order to estimate high reflection coating and the experimental results in advance, the simulation program, the Essential Macleod Program was adopted. SiO2 thin film showed the low refractive index of 1.6259 and TiO2 thin film showed high refractive index of 2.4722 at a wavelength of 633 nm measured by ellisometry measurement. The spectral reflectance of stainless steel increased up to around 75% by multi layer optical coating at a wavelength range of 400 - 550 nm.

Keywords: Reflectance, Coating, EMP, RF sputtering